THE ELIMINATOR CAG
Room Temperature Purifier for Inert Gases and Hydrogen

APPLICATIONS

APIMS Zero and Calibration
Semiconductor Industry
Semiconductor Process Equipment
Gas Cylinder Cabinets
Gas Analyzer Carts
Analytical Industry

FEATURES

Outlet purity guarantee to < 0.5 ppb1
No heaters or power required
Room-temperature operation
316L SS (<10 Ra EP) vessel life-no need for H2 in regenaration gas
Field regenerable for up to 10 year life -
Improved process equipment perfomance
Optional built-in 0.003 µm filter (PF-Series)
High Flow - up to 300 slpm
Low cost (initial and operating)

The NuPure® Eliminator® CAG uses a new, patented Catalyst/Absorber/Getter (CAG) purifier technology, which represents a major improvement over all other inert gas chemistries. This results in the best outlet purity guarantees of < 0.5 ppb1 per impurity2. The CAG purifiers achieve this outstanding perfomance at room temperature. They are ideally suited to purifying inert gases from liquid sources.

The NuPure® Eliminator® CAG gas purifiers come in standard size ranges from 0 to 300 slpm, with the XL version especially suitable for high flow applications. The use of factory-installed inlet isolation valve is recommended for ease of installation and elimination of possible operator error.

With the purchase of the newly-introduced Field Regeneration Kit, the purifier's operating cost can be reduced to almost zero. Field regeneration is particularly simple and convenient because the CAG can be regenerated without need for hydrogen!.