Ceramic and Metal Gas Particle Filters

APPLICATIONS

Semiconductor Industry
Zero for Particle Testing
Gas Cabinets
Valve Manifold Boxes
Process Tool Gas Panels
Research and Development
Specialty Gas Mixing

In today’s demanding semiconductor industry, there is a greater need for the removal of particles suspended in the gas phase to increase product yield and protect expensive tooling. In addition to the extensive gas purification product line, NuPure offers a broad selection of both Ceramic and Metal particle filters giving the semiconductor industry and process equipment manufacturers a total solution to the delivery of Ultra-Clean gases to the point-of-use.

FEATURES

Ultra fine filtration down to 0.003µm
Particle retention up to 99.9999999% (9 log)
Flow rates up to 360 slpm (at 5 atm operating)
Inert and corrosive gas applications
No shedding
316L SS VAR (<5 Ra EP) surface finish
Hastelloy C-22 housing for corrosive gases
Bakeable 450o C (SS) / 200o C (Ceramic)
Operation to 450o C (SS) / 120o C (Ceramic)
High Pressure Rating (to 3000 psig)
Leak rate tested to < 2 x 10-10 atm cc/sec He

Ceramic Filter: NuPure’s C3 Series Ceramic Gas Filters employ tube-type ceramic filter media that features 20% less surface area than competitors hexagonal multichannel media. As a result these filters demonstrate excellent out-gassing characteristics and extremely rapid gas displacement. The use of rigid ceramic media eliminates particle shedding during pressure or flow fluctuations. Three layer construction, each layer with successively smaller pores, provides 99.9999999% retention efficiency at removing particles down to .003µm in size, while maintaining good flow characteristics.

C2 Ceramic Filter: NuPure’s C2 Series Ceramic Gas filters utilize a new two-layer tube type ceramic media. The C2 combines exceptionally low pressure drop at high flows with a 99.99999% particle retention efficiency down to 0.003µm, making it especially suitable for high-flow applications.

SS All-Metal Filter: The SS Series Gas Filter features all 316L stainless steel construction. The all metal design of this filter allows for operation at temperatures as high as 450o C. This high performance gas filter combines excellent particle removal efficiency, low out-gassing and low pressure drop in an extremely compact design. Factory bake-out is standard.

All the above series are available with either MVCR fittings, Swagelok type, or Surface Mount interface - (per SEMI 2787.1, .2, .3, .4, .5). The Surface Mount configurations are available in both the 1.5" and 1.125" sizes.

NuPure® Gas Particle Filters

Typical Perfomance and Dimensional Specifications

*.VCR and Swagelok are the trademarks of Swagelok Co. For Swagelok fittings, replace "V" by "S" in the Part Number.

**-B denotes ceramic filter to be supplied with optional bake-out and shipped with 316L SS Caps

NOTE:Baking and capping is included at no charge in all NuPure metal filters.

To order a particle filter with Hastelloy C-22 housing, please replace "SS" with "HS"