Flow Rate : 30 sccm ~ 30 slpm Seal type : VITON
Power : ± 15VDC or +24VDC Signal type : 0 ~ 5VDC
4 ~ 20mA Fitting : 1/4" VCR or 1/4" LOK
3/8" VCR or 3/8" LOK
ALICAT - PC Series
Flow Rate : 2 sccm ~ 50 slpm Seal type : VITON or Metal
Power : ± 15VDC or +24VDC Signal type : 0 ~ 5VDC
4 ~ 20mA Fitting : 1/4" VCR or 1/4" LOK
3/8" VCR or 3/8" LOK
ALICAT - PCD Series
Flow Rate : 2 sccm ~ 50 slpm Seal type : VITON or Metal
Power : ± 15VDC or +24VDC Signal type : RS-485 ( RJ - 11 )
Modbus-RTU Fitting : 1/4" VCR or 1/4" LOK
3/8" VCR or 3/8" LOK
WIZ - 501 LF
WIZ - 501C (LT)
Flow Rate : 2 sccm ~ 50 slpm Seal type : VITON or Metal
Power : ± 15VDC or +24VDC Signal type : RS-485 ( RJ - 11 )
Modbus-RTU Fitting : 1/4" VCR or 1/4" LOK
3/8" VCR or 3/8" LOK