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Mass Flow Controller & Meter

MC1600L.png
MC1600L.png

Flow Rate : 30 sccm ~ 30 slpm
Seal type : VITON
Power : ± 15VDC or +24VDC

Signal type : 0 ~ 5VDC
                      4 ~ 20mA

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

MC - 1600L Series

AN600S.png
AN600S.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : ± 15VDC or +24VDC

Signal type : 0 ~ 5VDC
                      4 ~ 20mA

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

AN - 600 Series

DG900S.png
DG900S.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : ± 15VDC or +24VDC

Signal type : RS-485 ( RJ - 11 )
                      Modbus-RTU

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

DG - 900 Series

PB700S.png
PB700S.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : +24VDC

Signal type : PROFIBUS

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

PB - 700 Series

DN-800.png
DN-800.png

Flow Rate : 5 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : +24VDC

Signal type : DEVICE-NET
                      (M12 - 5Pin)  

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

DN - 800 Series

EC-500.png
EC-500.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : +24VDC

Signal type : ETHER-CAT
                      (M8 - 5Pin)

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

EC - 500 Series

EP400S.png
EP400S.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : +24VDC

Signal type : ETHERNET/IP
                      (M8 - 5Pin)

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

EP - 400 Series

PN-300.png
PN-300.png

Flow Rate : 2 sccm ~ 50 slpm
Seal type : VITON or Metal
Power : +24VDC

Signal type : PROFINET
                      (M8 - 5Pin)
   
Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

PN - 300 Series

CM100C.png
CM100C.png

Flow Rate : 2  ~ 5000 sccm
Seal type : VITON
Power : ±15VDC or +24VDC

Signal type : RS-485
                      (D-SUB 9Pin)  

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

CM - 100 Serise

TSC220.jpg

Flow Rate : 10 sccm ~ 30 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC
                      4 ~ 20mA

Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

TSC - 200 Series

TSC100.jpg

Flow Rate : 100 slom ~ 2000 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC
                      4 ~ 20mA

Fitting : 3/8" LOK , 1/2" LOK
              3/4" LOK , 1" LOK 

TSC - 100 Series

VICD245.png

Flow Rate : 100 slpm ~ 400 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4~20mA
                      RS - 485
   
Fitting : 3/8" LOK , 1/2" LOK
              3/4" LOK  

VICD-245

VICD220.jpg

Flow Rate : 5 sccm ~ 200 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4~20mA                                RS - 485   
Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

VIC-D200 Series

VICD150.png

Flow Rate : 400slpm ~ 2000 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4~20mA                                RS - 485   
Fitting : 3/8" LOK , 1/2" LOK
              3/4" LOK , 1" LOK

VIC-D100 Series

TSMD Series.jpg

Flow Rate : 5 sccm ~ 5000 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4 ~ 20mA
                      RS - 485

Fitting : 1/4" LOK , 3/8" LOK , 1/2" LOK
              3/4" LOK , 1" LOK 

TSM-D200 Series

TSMD200D Series.JPG

DISPLAY MFM

Flow Rate : 5 sccm ~ 5000 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4 ~ 20mA
                      RS - 485

Fitting : 1/4" LOK , 3/8" LOK , 1/2" LOK
              3/4" LOK , 1" LOK 

TSM-D200D Series

EXO-110.png

Flow Rate : 5 sccm ~ 200 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4~20mA                                RS - 485   
Fitting : 1/4" VCR or 1/4" LOK
              3/8" VCR or 3/8" LOK 

EXO-100 Series

EXO-U145.jpg

Flow Rate : 100slpm ~ 3000 slpm
Seal type : VITON
Power : +24VDC

Signal type : 0 ~ 5VDC / 4~20mA                                RS - 485   
Fitting : 3/8" LOK , 1/2" LOK
              3/4" LOK , 1" LOK

EXO-U100 Series

Flow Rate : 0.5 sccm ~ 5000 slpm
Seal type : Elastomer
Power : +12 ~ 24VDC

Signal type : 0 ~ 5VDC / 4 ~ 20mA
                      RS - 232

Fitting : M5 Female 
               1/8" NTPF 1/4" NPTF 

ALICAT - MC Series

Flow Rate : 0.5 sccm ~ 5000 slpm
Seal type : Elastomer
Power : +12 ~ 24VDC

Signal type : 0 ~ 5VDC / 4 ~ 20mA
                      RS - 232

Fitting : M5 Female 
               1/8" NTPF 1/4" NPTF 

ALICAT - M Series

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